Hybrid Physical Chemical Vapour Deposition (HPCVD) of Superconducting MgB2 Thin Films on three Dimensional Copper Substrates

The present work reports the design, development and application of a novel Hybrid Physical Chemical Vapour Deposition (HPCVD) technique for depositing MgB2 thin films, with potential superconductivity, directly on three dimensional (3D) surfaces. A novel solenoid magnetron based set up was used for depositing MgB2 thin films on 3D surfaces of Cu tube. Mg rod was used as the sputter target and source of Mg while high purity BBr3 was used as a novel boron precursor, which was injected into the system using Argon as carrier gas. The plasma mediated decomposition of BBr3 in presence of H2 gas was followed by chemical reaction between Mg and B atoms to deposit MgB2 film on the substrate. Samples were characterized by SEM, EDX, XRD and SQUID techniques. SEM-EDX confirmed deposition of a homogeneous, pore free and dense MgB2 film, while XRD analysis revealed the film to be polycrystalline and multiphasic rather than being purely c-axis oriented. Superconductivity analysis carried out using S