Fabrication Of Ultra-sensitive Optical Fiber Based Humidity Sensor Using TiO2 thin Film

Thin films of titanium dioxide in anatase form have been prepared using isobutyl titanate as precursor. The resulting TiO2 was coated on an U-shaped pyrex glass rod to sense the humidity of a controlled humid environment using optical fiber approach. The humidity sensing characteristics and the sensing mechanism have been investigated by measuring the output power of the sensor at different humidity. The developed humidity sensor was responded in the humidity ranging from 10 to 95% of relative humidity and exhibited the sensitivity of 0.78, response time 36s and recovery time 73s.